Chemical Name:  Tungsten pentachloride

Chemical Formula:  W Cl₅

CAS Number:  13470-14-9

Synonyms:  Tungsten chloride; WCl5

Molecular Weight:  361.10

Purity:99.5%

Packaging: 1kg or 10kg/drum

Tungsten pentachloride is the most advanced semiconductor material available today. As semiconductor materials are increasingly demanding for CVD tungsten sources, tungsten pentachloride is the preferred material for semiconductor materials with a coil width below 10 nm.