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Chemical Name: Tungsten pentachloride
Chemical Formula: W Cl5
CAS Number: 13470-14-9
Synonyms: Tungsten chloride; WCl5
Molecular Weight: 361.10
Purity:99.5%
Packaging: 1kg or 10kg/drum
Tungsten pentachloride is the most advanced semiconductor material available today. As semiconductor materials are increasingly demanding for CVD tungsten sources, tungsten pentachloride is the preferred material for semiconductor materials with a coil width below 10 nm.