Recently, our company has successfully developed TaCl5 with 5N specification according to the customer's demand, and controlled the main metal impurities to meet the customer's ALD process requirements.

Our company focuses on the research, production and sales of new materials of rare metal chlorides, and we can carry out customized development and mass production work of all kinds of new chlorides according to the requirements of customers.

At present, we can provide a variety of products such as 5N purity WCl5, TaCl5, MoO2Cl2, MoCl5, HfCl4 and so on.

Hunan Huajing Powder Material Co., Ltd. was founded in 2007, after more than ten years of development and precipitation. At present, our company has the world's leading level of chloride R & D and manufacturing capacity, was awarded the national key specialties and new “small giants” enterprises, the provincial enterprise technology center, the provincial new materials enterprises and other awards. Our products have a very high market share in mainland China, South Korea and Japan, and we are the core supplier of electronic chemicals in the semiconductor field.

Keywords: high purity, metal chlorides, 5N， TaCl5

Picture .Tantalum Pentachloride