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High purity molybdenum dioxydichloride(MoO2Cl2)for semi-conductor material

September 30,2024

Molybdenum is a Group vi metal element, which has a very high melting point, low thermal expansion coefficient, low resistivity and high thermal conductivity characteristics, is widely used in the manufacture of semiconductor devices, including diffusion barriers, electrodes, light masks, power electronics substrates, low resistivity gates and interconnects. Molybdenum dioxide dichloride is a yellow-white solid and is often used as one of the molybdenum sources for chemical vapor deposition of molybdenum-containing materials.

The application of this type of molybdenum film deposition is mainly due to the high conformal properties of the deposited film and the efficient deposition rate that can accommodate high-volume processing operations.

Molybdenum dioxide dichloride (MoO2Cl2) is an inorganic compound with a solid form, appears as a yellow to orange crystal or powdery substance.Molybdenum dioxide dichloride is slightly dissolved in non-polar solvents, but it is better dissolved in polar solvents. It is can be widely used in catalyst: Molybdenum dioxide dichloride is often used as a catalyst in organic synthesis reactions, such as oxidation, carbonyl reduction and space-time selective hydrogenation of olefin reactions. PECVD film deposition: Molybdenum dioxide dichloride can also be used to prepare molybdenum oxide film, by PECVD (plasma enhanced chemical vapor deposition) technology.

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Molybdenum dioxide dichloride produced by Huajing Material has a high product purity, which is the first product in the world with 99.9999% purity. At present, the products are constantly evaluated in many manufacturers in South Korea, and the performance effect is widely praised. Especially in terms of active ingredients, TGA results show that 6N MoCl2O2 produced by Huajing has more than 99% of active ingredients. Huajing adopts the most advanced metal purification technology, the first synthetic purification synchronous production technology in China, and has a high technical level.